The Kelly Quartz  of High Temperature Recirculating Quartz Bath is the result of almost 10+ years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. We define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our quartz bath products.

Quartz Bath Features and Benefits:

Nested 5 sided heating element 360o serrated overflow weir 

Dual safety snap switch 

Seamless, sloped flange design 

Fast, more even heating 

Facilitates laminar flow while minimizing particulate contamination 

Minimizes damages resulting from runaway temperatures 

Improves up time and reliability due to longer vessel life

Quartz Bath System Specifications:

Quartz Bath for 1-8” carrier

Applications: Etching, Stripping, Cleaning 

Chemical usage: H2SO4, H2O2, SC1, etc. 

Operating temperature range: 30 o – 180 oC 

Process temperature control: ± 1 oC (depends on controller and process) 

Heat-up rate: 2 o C per minute (rate affected by size of system, fluid, etc.) 

Circulating fluid inlet / outlet: 3/4” Male Flaretek

Quartz Bath Options:

Liquid Level Sensor 

Quartz diffuser plate 

Process temperature controller 

Autolid 

Custom vessel sizes 

Water Ring Seal (WRS) -30 month warranty, 360 degree Labyrinth seal, Contact us for specific bath price

Quartz Bath Facility Requirements:

Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)

Quartz Bath Construction Materials:

Process Vessel: Semiconductor grade, flame-polished, quartz 

Housing: UL-94 VO rated FRPP 

Process thermocouple: Teflon encapsulated J-type 

Insulation: High density alumina silica fiber rated to 1260 o C